Au99s Inline Dispensing Systems for the Semiconductor Industry

Product Features

The Au series of in-line, fully automatic, high-speed dispensing systems handles a wide range of dispensing applications.

High Cost-Performance Ratio

An integrated frame design ensures structural stability, resulting in longer system uptime, reduced downtime, and higher efficiency. The use of top-tier international components minimizes failure rates and significantly lowers operating costs. With fewer wear-prone parts, procurement costs are saved. High-end linear motors paired with micron-resolution linear scales for closed-loop control ensure superior precision and reliability.

Flexibility

The Au series accommodates products with various substrate sizes. It offers flexible configuration of functional modules, such as dual tracks, dual valves, tilt capabilities, and three-stage bottom heating. The versatile platform supports diverse dispensing processes and adhesive types, allowing for rapid product changeovers. It also supports flexible configuration of various dispensing valves, including jetting valves and screw valves.

Increased Productivity

Reduces manual intervention and boosts equipment utilization rates. Precise adhesive volume control and accurate vision algorithms improve dispensing yields. Linear motor drives enable faster motion, minimizing non-productive travel time.

Non-Contact Jetting: Pneumatic and Piezoelectric Jetting Valves

Eliminates the need for Z-axis movement. Pneumatic jetting speeds reach up to 250 dots/s—3 to 7 times faster than traditional dispensing—while piezoelectric jetting speeds can reach up to 500 dots/s. Capable of dispensing volumes as low as 3 nL with consistency unattainable by traditional methods. Non-contact operation prevents needle collisions with the workpiece, and the ability to dispense minute volumes makes it suitable for compact spaces.

Specifications